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Stress relaxation during the growth of thin films
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10.1063/1.2357569
/content/aip/journal/apl/89/13/10.1063/1.2357569
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/13/10.1063/1.2357569
/content/aip/journal/apl/89/13/10.1063/1.2357569
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/content/aip/journal/apl/89/13/10.1063/1.2357569
2006-09-25
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Stress relaxation during the growth of 3C-SiC∕Si thin films
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/13/10.1063/1.2357569
10.1063/1.2357569
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