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Photovoltaic effect on the conductive atomic force microscopic characterization of thin dielectric films
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1.
1.S. D. Wang, M. N. Chang, C. Y. Chen, and T. F. Lei, Electrochem. Solid-State Lett. 8, G233 (2005).
http://dx.doi.org/10.1149/1.1990028
2.
2.P. Eyben, D. Alvarez, M. Jurczak, R. Rooyackers, A. De Keersgieter, E. Augendre, and W. Vandervorst, J. Vac. Sci. Technol. B 22, 364 (2004).
http://dx.doi.org/10.1116/1.1638772
3.
3.M. Porti, M. Nafria, X. Aymerich, A. Olbrich, and B. Ebersberger, Appl. Phys. Lett. 78, 4181 (2001).
http://dx.doi.org/10.1063/1.1382624
4.
4.H. Ikeda, N. Kurumado, K. Ohmori, M. Sakashita, A. Sakai, S. Zaima, and Y. Yasuda, Surf. Sci. 493, 653 (2001).
http://dx.doi.org/10.1016/S0039-6028(01)01278-X
5.
5.S. J. O’Shea, R. M. Atta, M. P. Murrell, and M. E. Welland, J. Vac. Sci. Technol. B 13, 1945 (1995).
http://dx.doi.org/10.1116/1.588113
6.
6.M. Porti, M. Nafría, M. C. Blum, X. Aymerich, and S. Sadewasser, Appl. Phys. Lett. 81, 3615 (2002).
http://dx.doi.org/10.1063/1.1519357
7.
7.H. Ikeda, T. Goto, M. Sakashita, A. Sakai, S. Zaima, and Y. Yasuda, Jpn. J. Appl. Phys., Part 1 42, 1949 (2003).
8.
8.S. Kremmer, C. Teichert, E. Pischler, H. Gold, F. Kuchar, and M. Schatzmayr, Surf. Interface Anal. 33, 168 (2002).
http://dx.doi.org/10.1002/sia.1183
9.
9.M. N. Chang, C. Y. Chen, W. W. Wan, and J. H. Liang, Appl. Phys. Lett. 84, 4705 (2004).
http://dx.doi.org/10.1063/1.1762692
10.
10.M. N. Chang, C. Y. Chen, F. M. Pan, J. H. Lai, W. W. Wan, and J. H. Liang, Appl. Phys. Lett. 82, 3955 (2003).
http://dx.doi.org/10.1063/1.1581987
11.
11.S. Shin, J.-I. Kye, U. H. Pi, Z. G. Khim, J. W. Hong, S. Park, and S. Yoon, J. Vac. Sci. Technol. B 18, 2664 (2000).
http://dx.doi.org/10.1116/1.1326947
12.
12.M. N. Chang, C. Y. Chen, W. J. Huang, and T. C. Cheng, Appl. Phys. Lett. 87, 023102 (2005).
http://dx.doi.org/10.1063/1.1994949
13.
13.D. K. Schroder, Semiconductor Material and Device Characterization, 2nd ed. (Wiley, New York, 1998), p. 440.
14.
14.E. S. Yang, Microelectronic Devices, 1st ed. (McGraw-Hill, New York, 1988), p. 360.
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Figures

Image of FIG. 1.

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FIG. 1.

(Color online) curves obtained from samples 1 and 2, with and without photoperturbations. Although the illumination change is the same, sample 1 exhibits a higher onset voltage shift than sample 2 does.

Image of FIG. 2.

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FIG. 2.

(Color online) Current images of sample 2 at a sample bias of (a) with and (b) without photoperturbation; (c) the statistical results of the current distributions corresponding to (a) and (b).

Image of FIG. 3.

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FIG. 3.

(Color online) Current images of sample 3 at a sample bias of (a) with and (b) without photoperturbation; (c) the statistical results of the current distributions corresponding to (a) and (b).

Image of FIG. 4.

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FIG. 4.

(Color online) curves for samples 1 and 4 with and without photoperturbations. Although the change in illumination is the same, sample 4 exhibits a bigger change in the onset voltage than sample 1 does.

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/content/aip/journal/apl/89/13/10.1063/1.2357873
2006-09-26
2014-04-25

Abstract

The authors have used front-wing conductive probes to investigate the photovoltaiceffect on the conductive atomic force microscopic (C-AFM) characterization of thin dielectric films. The surface photovoltage induced by the laser beam of an atomic force microscope can enhance the electrical field across the studied dielectric film, decreasing the onset voltage of the leakage current, resulting in a modified C-AFM image with a larger current distribution. Moreover, the experimental results also revealed that the influence of the photovoltaiceffect on C-AFM would be more significant for dielectric films that are grown on a substrate with a higher carrier concentration.

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Scitation: Photovoltaic effect on the conductive atomic force microscopic characterization of thin dielectric films
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/13/10.1063/1.2357873
10.1063/1.2357873
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