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(Color online) Apparent mass change as determined from the QCM signal for (a) an ALD cycle including dosing and plasma exposure and (b) only plasma exposure.
(Color online) Time-resolved mass spectrometry signals for several ALD cycles. The most likely parent molecules contributing to the signals at the selected mass-to-charge ratios are indicated.
(Color online) (a) Emission from a pure plasma and an plasma ignited after a preceding dose as recorded in the first after the plasma strike. (b) Time-resolved signal of selected emission lines during the plasma step after a preceding dose.
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