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In situ electric field simulation in metal/insulator/metal capacitors
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10.1063/1.2357891
/content/aip/journal/apl/89/13/10.1063/1.2357891
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/13/10.1063/1.2357891

Figures

Image of FIG. 1.
FIG. 1.

(a) TEM micrograph, (b) digital treatment, and (c) interface profile superimposition on original TEM picture.

Image of FIG. 2.
FIG. 2.

(Color online) In situ electric field distribution in the thick layer of a MIM capacitor.

Image of FIG. 3.
FIG. 3.

(Color online) Electric field cross section along the red line in Fig. 2.

Image of FIG. 4.
FIG. 4.

(Color online) Leakage current characteristic of a MIM capacitor and its probable correlation to interface roughness (measured at ).

Image of FIG. 5.
FIG. 5.

(Color online) Bottom electrode’s roughness dependence on leakage current at and in an integrated MIM capacitor (measured of ).

Tables

Generic image for table
Table I.

Bottom and top interface roughness.

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/content/aip/journal/apl/89/13/10.1063/1.2357891
2006-09-26
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: In situ electric field simulation in metal/insulator/metal capacitors
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/13/10.1063/1.2357891
10.1063/1.2357891
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