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(a) TEM micrograph, (b) digital treatment, and (c) interface profile superimposition on original TEM picture.
(Color online) In situ electric field distribution in the thick layer of a MIM capacitor.
(Color online) Electric field cross section along the red line in Fig. 2.
(Color online) Leakage current characteristic of a MIM capacitor and its probable correlation to interface roughness (measured at ).
(Color online) Bottom electrode’s roughness dependence on leakage current at and in an integrated MIM capacitor (measured of ).
Bottom and top interface roughness.
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