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(a) SEM micrograph of a -long bridge with the gate underneath. (b) Schematic illustration of the resonance frequency measurements of a microbridge in DI water.
Vibration amplitude as a function of the actuation frequency of a electrostatically actuated microbridge measured in vacuum, air, and DI water. The peak indicates the resonance frequency .
Resonance frequency averaged for several microbridges, plotted as a function of the microbridge length using electrostatic actuation in vacuum, air, and DI water. The dotted lines represent the predicted using Eq. (2) for air and DI water. The solid line is a fit of the values of in vacuum to Eq. (1).
Quality factor averaged for several microbridges, as a function of the microbridge length for measurements in vacuum, air, and DI water. The dotted lines are the quality factors calculated using Eq. (3) for resonance in air and water of isolated structures. The solid line was calculated using the equation proposed by Hosaka et al. (Ref. 17) where squeeze damping is considered due to the proximity of the bridge and gate counterelectrode.
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