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Electrostatically actuated resonance of amorphous silicon microresonators in water
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10.1063/1.2358215
/content/aip/journal/apl/89/14/10.1063/1.2358215
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/14/10.1063/1.2358215
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) SEM micrograph of a -long bridge with the gate underneath. (b) Schematic illustration of the resonance frequency measurements of a microbridge in DI water.

Image of FIG. 2.
FIG. 2.

Vibration amplitude as a function of the actuation frequency of a electrostatically actuated microbridge measured in vacuum, air, and DI water. The peak indicates the resonance frequency .

Image of FIG. 3.
FIG. 3.

Resonance frequency averaged for several microbridges, plotted as a function of the microbridge length using electrostatic actuation in vacuum, air, and DI water. The dotted lines represent the predicted using Eq. (2) for air and DI water. The solid line is a fit of the values of in vacuum to Eq. (1).

Image of FIG. 4.
FIG. 4.

Quality factor averaged for several microbridges, as a function of the microbridge length for measurements in vacuum, air, and DI water. The dotted lines are the quality factors calculated using Eq. (3) for resonance in air and water of isolated structures. The solid line was calculated using the equation proposed by Hosaka et al. (Ref. 17) where squeeze damping is considered due to the proximity of the bridge and gate counterelectrode.

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/content/aip/journal/apl/89/14/10.1063/1.2358215
2006-10-04
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electrostatically actuated resonance of amorphous silicon microresonators in water
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/14/10.1063/1.2358215
10.1063/1.2358215
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