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Defect structure in micropillars using x-ray microdiffraction
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10.1063/1.2358204
/content/aip/journal/apl/89/15/10.1063/1.2358204
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/15/10.1063/1.2358204
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Laue pattern of DRIE-Si pillar (a), SEM picture (b), truncated contour plot (c), and 2D intensity distribution (d) of .

Image of FIG. 2.
FIG. 2.

(Color online) SEM picture of the FIB-Si pillar (a) and contour plots of the reflections [(b)–(d)] , (133), and (113).

Image of FIG. 3.
FIG. 3.

(Color online) Contour plots of two reflections of the Au pillar [(a) and (b)], SEM picture of the Al pillar (c), and contour plot of an Al reflection showing continuous streaking (d).

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/content/aip/journal/apl/89/15/10.1063/1.2358204
2006-10-11
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Defect structure in micropillars using x-ray microdiffraction
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/15/10.1063/1.2358204
10.1063/1.2358204
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