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Method to assess the grain crystallographic orientation with a submicronic spatial resolution using Kelvin probe force microscope
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10.1063/1.2359297
/content/aip/journal/apl/89/15/10.1063/1.2359297
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/15/10.1063/1.2359297
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) CPD between the KFM tip and a copper layer surface obtained by scanning the same line for different relative humidities (RHs). CPD amplitudes are, respectively, 20, 25, and for 40%, 20%, and 2% RHs.

Image of FIG. 2.
FIG. 2.

(Color online) Electrical response of the KFM to a peak to peak square-wave external excitation. The electric accuracy is smaller than .

Image of FIG. 3.
FIG. 3.

(Color online) Picture of the probed copper area with regard to the FIB engraved reference mark.

Image of FIG. 4.
FIG. 4.

(Color online) (a) Topography and (b) WF mappings of the same polished copper area .

Image of FIG. 5.
FIG. 5.

(Color online) EBSD analysis of the Cu area previously characterized with KFM technique .

Image of FIG. 6.
FIG. 6.

(Color online) Potential profile along the dashed line on the WF mapping in Fig. 4(b). The origin of the WF axis corresponds to .

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/content/aip/journal/apl/89/15/10.1063/1.2359297
2006-10-10
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Method to assess the grain crystallographic orientation with a submicronic spatial resolution using Kelvin probe force microscope
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/15/10.1063/1.2359297
10.1063/1.2359297
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