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(Color online) CPD between the KFM tip and a copper layer surface obtained by scanning the same line for different relative humidities (RHs). CPD amplitudes are, respectively, 20, 25, and for 40%, 20%, and 2% RHs.
(Color online) Electrical response of the KFM to a peak to peak square-wave external excitation. The electric accuracy is smaller than .
(Color online) Picture of the probed copper area with regard to the FIB engraved reference mark.
(Color online) (a) Topography and (b) WF mappings of the same polished copper area .
(Color online) EBSD analysis of the Cu area previously characterized with KFM technique .
(Color online) Potential profile along the dashed line on the WF mapping in Fig. 4(b). The origin of the WF axis corresponds to .
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