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Single-walled carbon nanotube growth from ion implanted Fe catalyst
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Image of FIG. 1.
FIG. 1.

(Color online) [(a)–(c)] AFM images of Fe catalyst nanoparticles formed after annealing the as-implanted substrates, and [(d)–(f)] Carbon nanotubes grown by CVD from the catalyst nanoparticles of (a)–(c), respectively. The implant doses are [(a) and (d)] , [(b) and (e)] , and [(c) and (f)] at an energy of .

Image of FIG. 2.
FIG. 2.

(Color online) (a) Cross-sectional schematic (not to scale) and (b) top view optical microscope image of the micromachined Si TEM grids that we have fabricated. [(c) and (d)] HRTEM images obtained from the , implanted micromachined TEM grids, showing SWCNTs. All of the 85 nanotubes imaged by HRTEM were single-walled and no multiwalled nanotubes were observed.

Image of FIG. 3.
FIG. 3.

Tangential mode ( band) micro-Raman spectra of nanotubes grown from , implanted catalyst. A Lorentzian fit of the -band spectrum yields peaks at 1570, 1579, and . Inset shows radial breathing mode (RBM) Raman spectrum with a peak at , which corresponds to a SWCNT diameter of around (Ref. 11).


Generic image for table
Table I.

Average height and density of catalyst nanoparticles formed after annealing and the average diameter and density of nanotubes grown for each Fe ion implantation condition. Between 60–400 catalyst nanoparticles and 130–200 nanotubes from several different samples were characterized to obtain the values listed for each implantation condition.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Single-walled carbon nanotube growth from ion implanted Fe catalyst