1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Electrical characterization of defects introduced in -type Ge during indium implantation
Rent:
Rent this article for
USD
10.1063/1.2360922
/content/aip/journal/apl/89/15/10.1063/1.2360922
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/15/10.1063/1.2360922

Figures

Image of FIG. 1.
FIG. 1.

DLTS spectra of In-implanted Ge [curve (a)], high-energy electron irradiated Ge [curve (b)], and Xe-ion-implanted Ge [curve (c)]. These spectra were recorded using a rate window of at a quiescent reverse bias of with a filling pulse of superimposed on the reverse bias.

Image of FIG. 2.
FIG. 2.

Arrhenius plots for defects in In-implanted Ge (triangles) and MeV electron irradiated Ge (circles). The solid triangles represent measurements after annealing at . All data were acquired using the bias and pulsing conditions defined in the caption of Fig. 1.

Image of FIG. 3.
FIG. 3.

DLTS spectra of Pd Schottky contacts on In-implanted Ge: (a) room temperature and subsequently annealed at (b) , (c) , (d) , (e) , (f) , (g) . Curve (h) was recorded from a new Schottky contact deposited on In-implanted Ge that was annealed at before metallization.

Tables

Generic image for table
Table I.

Electronic properties of prominent defects introduced in -type Ge during In implantation and MeV electron irradiation of Schottky contacts.

Loading

Article metrics loading...

/content/aip/journal/apl/89/15/10.1063/1.2360922
2006-10-13
2014-04-17
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electrical characterization of defects introduced in n-type Ge during indium implantation
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/15/10.1063/1.2360922
10.1063/1.2360922
SEARCH_EXPAND_ITEM