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Effect of nitrogen incorporation on the thermal stability of sputter deposited lanthanum aluminate dielectrics on Si (100)
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10.1063/1.2361170
/content/aip/journal/apl/89/15/10.1063/1.2361170
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/15/10.1063/1.2361170
/content/aip/journal/apl/89/15/10.1063/1.2361170
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/content/aip/journal/apl/89/15/10.1063/1.2361170
2006-10-11
2014-10-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of nitrogen incorporation on the thermal stability of sputter deposited lanthanum aluminate dielectrics on Si (100)
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/15/10.1063/1.2361170
10.1063/1.2361170
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