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Nonconductive polymer microresonators actuated by the Kelvin polarization force
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10.1063/1.2362590
/content/aip/journal/apl/89/16/10.1063/1.2362590
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/16/10.1063/1.2362590
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) Schematic of the actuator design. A dielectric material experiencing a force normal to the electrode plates. (b) Electric field over the electrode gap for a dielectric beam [, , , (dielectric constant for SU-8 (Ref. 14)], simulated with FEM (Comsol). The cones indicate the trend of the gradient field . (c) Ratio of an adequate electrostatic force acting normal to electrode plates vs the simulated Kelvin polarization force . Assumed parameters: , , , , and .

Image of FIG. 2.
FIG. 2.

(Color online) (a) Schematic of a dielectric slab partially inserted into a capacitor, experiencing a force parallel to the electrode plates. (b) FE simulation of based on principle of virtual work assuming a relative dielectric constant and a thickness . The simulated data are fitted with Eq. (3).

Image of FIG. 3.
FIG. 3.

(a) SEM image of SU-8 microcantilevers located over electrode gaps. (b) Amplitude response of a mass-spring-damper system fitted to the resonance curve of an SU-8 cantilever. (c) Force vs driving voltage for SU-8 cantilever.

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/content/aip/journal/apl/89/16/10.1063/1.2362590
2006-10-17
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nonconductive polymer microresonators actuated by the Kelvin polarization force
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/16/10.1063/1.2362590
10.1063/1.2362590
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