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Micromachined piconewton force sensor for biophysics investigations
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) SEM image of a force transducer , with a scale bar of . Stiffer force sensor is shown for ease of display, while a longer, 581 force sensor is used for data in this report. (b) Schematic illustrating linewidth , inner spring length , and outer spring length . Not shown is the thickness , into the plane of the diagram. (c) picture of the device with single bead positioned near the front face of the electromagnet pole, with a scale bar of .

Image of FIG. 2.
FIG. 2.

Measured spring deflection vs magnet current for 11 different beads on three different sensors. Each trace represents an individual nonaveraged sweep with current increasing from . Magnet degaussed prior to each sweep. (Inset) Histogram of spring deflection at ; bin size . Each measurement for histogram represents an average displacement from nine successive image frames (to reduce noise from stray air currents).

Image of FIG. 3.
FIG. 3.

Measured (open circles) and calculated (lines) force vs applied magnet current for seven different axial displacements of a single bead (from top: 160, 200, 240, 300, 500, and ).


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Micromachined piconewton force sensor for biophysics investigations