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Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition
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View: Figures


Image of FIG. 1.
FIG. 1.

Top-view scanning electron microscope images of a triangular lattice Si slab PC coated with ALD thicknesses of (a) , (b) , (c) , (d) , and (e) . A cleaved cross section of the coated waveguide is shown in (f) and reveals complete infiltration of the air holes with solid .

Image of FIG. 2.
FIG. 2.

Schematic of the cross section of the slab waveguide at each stage in the coating. The labels to the left of each stage refer to the labels in Fig. 1 . Since the coatings are conformal, the holes fill from the bottom and the sides at an equal rate. In the final structure (e) the lattice has been completely filled with creating a slab cladding layer.

Image of FIG. 3.
FIG. 3.

(Color online) Measured (dots) and calculated (lines) photonic band structures for uncoated (left), coated (center), and coated (right) Si slab waveguide along the (a) and (b) directions. The dashed ellipses highlight the shifted bands.

Image of FIG. 4.
FIG. 4.

Experimentally determined midpoint frequency (a) and slope (b) of the lowest order band along the direction (solid circles) and the seconnd and fifth lowest bands along the direction (open triangles and squares, respectively) as a function of thickness. Band midpoints were measured at a normalized value of 0.26 for the lower bands and 0.30 for the high-order band. The and axes are the same for each panel set.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition