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Ferroelectric properties of integrated capacitors etched in noncrystalline phase
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10.1063/1.2369628
/content/aip/journal/apl/89/18/10.1063/1.2369628
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/18/10.1063/1.2369628
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Microscope image of the patterned-FeCAP array and (b) zoomed in microscope image of the sidewall of the patterned FeCAP.

Image of FIG. 2.
FIG. 2.

XRD patterns of (a) the substrate, (b) the noncrystalline films, (c) the crystalline films, and (d) the patterned FeCAP.

Image of FIG. 3.
FIG. 3.

(a) Ferroelectric and (b) fatigue properties of the crystalline film and the patterned FeCAP.

Image of FIG. 4.
FIG. 4.

(Color online) EDX spectra of the sidewall of the patterned FeCAP.

Image of FIG. 5.
FIG. 5.

Simultaneously obtained (a) topographic and (b) piezoresponse phase images of the patterned Pt/PT/PZT/PT/Pt sample. The white and black regions in the piezoresponse phase images correspond to negative and positive domains, respectively.

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/content/aip/journal/apl/89/18/10.1063/1.2369628
2006-10-30
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ferroelectric properties of Pt∕PbTiO3∕PbZr0.3Ti0.7O3∕PbTiO3∕Pt integrated capacitors etched in noncrystalline phase
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/18/10.1063/1.2369628
10.1063/1.2369628
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