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(a) Microscope image of the patterned-FeCAP array and (b) zoomed in microscope image of the sidewall of the patterned FeCAP.
XRD patterns of (a) the substrate, (b) the noncrystalline films, (c) the crystalline films, and (d) the patterned FeCAP.
(a) Ferroelectric and (b) fatigue properties of the crystalline film and the patterned FeCAP.
(Color online) EDX spectra of the sidewall of the patterned FeCAP.
Simultaneously obtained (a) topographic and (b) piezoresponse phase images of the patterned Pt/PT/PZT/PT/Pt sample. The white and black regions in the piezoresponse phase images correspond to negative and positive domains, respectively.
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