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Energy dependence of the optical constants ( and ) for Mo, Si, , , and calculated near the Si edge using the atomic scattering database of Henke et al. (Ref. 14).
Calculated soft x-ray reflectivity of ML structure with modulation period and for selected photon energy at Si edge, demonstrating sensitivity to interlayer compositions.
Measured XRR spectrum at energy of ML with modulation period and .
Measured soft x-ray reflectivity of ML at the same photon energies as calculated in Fig. 2. The best fit is obtained for composition and the results are given in Table I.
Best-fit results of soft x-ray resonant reflectivity measurements on ML with composition at interfaces obtained by tuning photon energy at Si edge. In square brackets are the tabulated values of and from Henke et al. (Ref. 14).
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