1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Determination of interlayer composition at buried interfaces using soft x-ray resonant reflectivity
Rent:
Rent this article for
USD
10.1063/1.2374865
/content/aip/journal/apl/89/18/10.1063/1.2374865
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/18/10.1063/1.2374865

Figures

Image of FIG. 1.
FIG. 1.

Energy dependence of the optical constants ( and ) for Mo, Si, , , and calculated near the Si edge using the atomic scattering database of Henke et al. (Ref. 14).

Image of FIG. 2.
FIG. 2.

Calculated soft x-ray reflectivity of ML structure with modulation period and for selected photon energy at Si edge, demonstrating sensitivity to interlayer compositions.

Image of FIG. 3.
FIG. 3.

Measured XRR spectrum at energy of ML with modulation period and .

Image of FIG. 4.
FIG. 4.

Measured soft x-ray reflectivity of ML at the same photon energies as calculated in Fig. 2. The best fit is obtained for composition and the results are given in Table I.

Tables

Generic image for table
Table I.

Best-fit results of soft x-ray resonant reflectivity measurements on ML with composition at interfaces obtained by tuning photon energy at Si edge. In square brackets are the tabulated values of and from Henke et al. (Ref. 14).

Loading

Article metrics loading...

/content/aip/journal/apl/89/18/10.1063/1.2374865
2006-11-02
2014-04-24
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Determination of interlayer composition at buried interfaces using soft x-ray resonant reflectivity
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/18/10.1063/1.2374865
10.1063/1.2374865
SEARCH_EXPAND_ITEM