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Combinatorial-mold imprint lithography: A versatile technique for fabrication of three-dimensional polymer structures
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10.1063/1.2219148
/content/aip/journal/apl/89/2/10.1063/1.2219148
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/2/10.1063/1.2219148
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Figures

Image of FIG. 1.
FIG. 1.

(Color online) Fabrication of T-bar structure by combinatorial-mold NIL. (a) A polymer film or a liquid resin is coated onto mold A. (b) Mold-to-mold imprinting is carried out at elevated temperature and pressure. The patterned film preferentially adheres to mold B after demolding. (c) The patterned film is stamped onto the substrate at elevated temperature and pressure. (d) Oxygen plasma etching is carried out to remove the suspended residue layer to give (e) segregated T-bar structures. (f) SEM cross-section view of isolated PMMA T bar on an indium tin oxide (ITO) coated glass. (g) SEM cross-section view of the cross-linked PS T-bar (from liquid resin) structure prior to oxygen plasma etching on Si substrate (h). SEM cross-section view of isolated T bars from image (g).

Image of FIG. 2.
FIG. 2.

(Color online) Combinatorial-mold NIL for a double grating structure is obtained from the combination of two identical molds: (a) a polymer film or liquid resin is coated onto one of the silane treated grating molds (in this case mold A). Mold B is then pressed into the polymer at elevated temperature and pressure. (b) Mold-to-mold imprint step where the double grating structure is formed. (c) Upon demolding, the polymer preferentially adheres to mold B. (d) The double grating structure is transferred to a substrate.

Image of FIG. 3.
FIG. 3.

SEM cross-section images of other complex 3D structures we have achieved. (a) Out-of-phase double grating structure. (b) Inverted “L” column array fabricated with cross-linked PS. (c) Inverted “Z” or “stair step” array fabricated with PMMA.

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/content/aip/journal/apl/89/2/10.1063/1.2219148
2006-07-12
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Combinatorial-mold imprint lithography: A versatile technique for fabrication of three-dimensional polymer structures
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/2/10.1063/1.2219148
10.1063/1.2219148
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