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Self-exciting, self-sensing piezoelectric microcantilevers with femtogram/Hertz sensitivity
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10.1063/1.2219994
/content/aip/journal/apl/89/2/10.1063/1.2219994
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/2/10.1063/1.2219994
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) A SEM photograph of a PEMS (PEMS-1), (b) that of a PEMS with extension (PEMS-2), and (c) that of the top surface of an ICP-etched PZT layer.

Image of FIG. 2.
FIG. 2.

Resonance spectrum of a PEMS (PEMS-1). The vertical dashed lines indicate the theoretical resonance frequencies.

Image of FIG. 3.
FIG. 3.

(a) The first-mode resonance spectra of PEMS-2 at various humidity levels and (b) resonance frequency vs relative humidity. Open (filled) triangles and open (filled) circles denote the humidity downsweep (upsweep) for the third-mode resonance peak of PEMS-1 and the first-mode resonance peak of PEMS-2, respectively.

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/content/aip/journal/apl/89/2/10.1063/1.2219994
2006-07-12
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Self-exciting, self-sensing PbZr0.53Ti0.47O3∕SiO2 piezoelectric microcantilevers with femtogram/Hertz sensitivity
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/2/10.1063/1.2219994
10.1063/1.2219994
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