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Electron-drift detection using directional planar probes in a low-pressure coaxial surface-wave discharge
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Image of FIG. 1.
FIG. 1.

(Color online) Scheme of the coaxial configuration with the SW discharge and of the planar probe experimental setup.

Image of FIG. 2.
FIG. 2.

Probe characteristics, measured at radial distance from the quartz tube, for gas pressure and injected power. P1 measurements (solid line) and P2 measurements at (dashed line), 90° (dotted line), and 180° (dashed-dotted line).

Image of FIG. 3.
FIG. 3.

Variations of the floating potential with respect to the plasma potential as a function of (a) the radial distance of P1 to the quartz tube and (b) the orientation of P2, at radial distance from the quartz tube. Measurements were carried out at injected power for the following gas pressures (in mTorr): 30 (solid lines), 60 (dashed lines), and 100 (dotted lines).

Image of FIG. 4.
FIG. 4.

Calculated (solid lines) and measured (dotted lines) P2 characteristics, obtained at and a radial distance of from the quartz tube, for pressure and injected power. The labels correspond to the different components with the electron population: thermal electrons and drift electrons ( and ). The line labeled Total is for the sum of these calculated components; the dashed line is for the calculated ion current.


Generic image for table
Table I.

Calculated plasma parameters, obtained by fitting P2 characteristics to a total probe current, with different electron drifting Maxwellian components and a saturated cold ion component, at and for the working conditions of Fig. 4.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electron-drift detection using directional planar probes in a low-pressure coaxial surface-wave discharge