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(a) AFM image of the surface of a several nanometer layer on a layer. (b) Schematic structure of the truncated hexagonal pyramid (THP) shaped hillocks on the surface with six sidewall facets. (c) SEM image of the emission surface of the SAH-LED with a low hillock density.
(a) Schematic structure of the fabricated SAH-LED. (b) Optical power and ESD pass yield of the SAH-LED (∎) and the normal-LED (▴).
Electrical characteristics of the normal LED and the ASH-LED with high density THP shaped hillock on emission surface.
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