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(Color online) Schematic process flow steps for the fabrication of polymer microfiber arrays with flat spatulate tips: (a) A SOI wafer top surface is patterned using optical lithography. (b) Negative fiber array template is formed using a two-step deep reactive ion etching process. (c) The template is filled with a liquid polymer under vacuum and the polymer is cured, or it is filled by gas phase deposition of a polymer. (d) Polymer fiber arrays with spatulate tips and a backing layer are released.
SEM image of the isometric view of a polyurethane elastomer microfiber array with fiber diameter, tip diameter, length, and 44% fiber density (scale bar: ).
(Color online) Macroscale adhesion (upper plot) and overall work of adhesion (lower plot) of polyurethane microfibers and flat polyurethane flat control surface on a diameter glass hemisphere for varying preloads.
Comparison of adhesive strength among various natural and synthetic gecko inspired microfibers/nanofibers (Ref. 15).
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