Full text loading...
Cross-sectional schematic diagram of the samples used in this study.
(a) Plan-view x-ray image of the joint before current stressing. The UBM and passivation openings were labeled by the dotted white circles. (b) X-ray image of the same joint after current stressing. The void was enclosed by the white line. (c) X-ray image of the same joint after being polished laterally to middle of the joint. (d) Cross-sectional SEM image of the joint in (c). A void formed near the entrance of the Al trace.
Plan-view x-ray images of the joint after stressing for (a) , (b) , (c) , and (d) . The position of the Al trace was labeled by the dotted lines in the figures.
Corresponding cross-sectional SEM images of the joint in Figs. 3(a)–3(d).
(a) Plot of depletion area as a function of stressing time. (b) Plot of void growth velocity against stressing time for the five samples. The depletion percentage of UBM opening for each sample was also shown in the figure.
Article metrics loading...