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Linear arrays of ceramic microcavity plasma devices ( diameter) driven by buried coplanar electrodes: Shaping the intracavity electric field and emission profile
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10.1063/1.2218307
/content/aip/journal/apl/89/3/10.1063/1.2218307
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/3/10.1063/1.2218307
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Figures

Image of FIG. 1.
FIG. 1.

Schematic diagrams (not to scale) of (a) end-on and (b) top views of two parallel, linear arrays of cylindrical microcavity plasma devices fabricated in ceramic (LTCC). Both arrays comprise 72 microcavities (for clarity, only seven are shown) of . All dimensions are expressed in mm. The weight of a completed chip having six linear arrays is .

Image of FIG. 2.
FIG. 2.

(Color) Images [(a) and (b)], recorded with a telescope and CCD camera at two values of magnification, of diameter devices operating in of Ne. The array was driven by a bipolar dc voltage wave form having a frequency of . (c) False color image of the calculated electric field strength within and surrounding the cylindrical microcavity (viewed along its axis) in the absence of plasma. The units for the electric field strength are , and .

Image of FIG. 3.
FIG. 3.

(Color) Spatially resolved emission produced in diameter microcavities: (a) False color images (at right) obtained at . The lower of the two images was recorded by attenuating the emission with a neutral density filter. On the left side, lineouts obtained in the longitudinal direction (the primary axis of the microplasma) at 400 and are compared. The scanning direction for the lineouts is indicated by the white arrow at the lower right of the figure; (b) false color images similar to those of part (a), but for , are shown on the right side. The lineouts at left illustrate the intensity profiles when scanning in the direction transverse to the discharge axis (as indicated by the white arrow).

Image of FIG. 4.
FIG. 4.

Voltage-current characteristics for a 72 device linear array of either 127 or diameter devices (indicated by the solid and open points, respectively) and Ne pressures of .

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/content/aip/journal/apl/89/3/10.1063/1.2218307
2006-07-18
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Linear arrays of ceramic microcavity plasma devices (127–180μm diameter) driven by buried coplanar electrodes: Shaping the intracavity electric field and emission profile
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/3/10.1063/1.2218307
10.1063/1.2218307
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