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Deterministic nanoassembly: Neutral or plasma route?
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10.1063/1.2222249
/content/aip/journal/apl/89/3/10.1063/1.2222249
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/3/10.1063/1.2222249
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Representative SEM micrograph of conical carbon nanotips grown by PECVD in gas mixture on Ni-catalyzed Si(100) (Ref. 20).

Image of FIG. 2.
FIG. 2.

(Color online) Three-dimensional topology of the ion current over the simulated nanopattern.

Image of FIG. 3.
FIG. 3.

(Color online) Developed carbon nanotip patterns (a) grown by CVD and (b) grown by PECVD in a plasma with . In both cases, the simulation was terminated when the coverage reached .

Image of FIG. 4.
FIG. 4.

Dependence of the nanotip apex angle (a) and mean height (b) on their mean radius for the neutral and plasma-aided processes with the plasma density as a parameter.

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/content/aip/journal/apl/89/3/10.1063/1.2222249
2006-07-19
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Deterministic nanoassembly: Neutral or plasma route?
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/3/10.1063/1.2222249
10.1063/1.2222249
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