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Thermal stability of amorphous films on silicon
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17.The nominal film thicknesses given were calculated from the fluxes of the molecular beams (measured by a quartz crystal microbalance), assuming that the amorphous films had the density of crystalline . The areal density of lanthanum and scandium in the films was confirmed by RBS. The thicknesses of the amorphous films were also measured by TEM and showed approximately three times the thicknesses determined assuming the density of crystalline . These differences will be discussed elsewhere.
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