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Suppression of phosphorus diffusion by carbon co-implantation
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10.1063/1.2234315
/content/aip/journal/apl/89/6/10.1063/1.2234315
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/6/10.1063/1.2234315
/content/aip/journal/apl/89/6/10.1063/1.2234315
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/content/aip/journal/apl/89/6/10.1063/1.2234315
2006-08-07
2015-08-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Suppression of phosphorus diffusion by carbon co-implantation
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/6/10.1063/1.2234315
10.1063/1.2234315
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