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Raman spectroscopy of sputtered AlN films: biaxial strain dependence
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10.1063/1.2335582
/content/aip/journal/apl/89/6/10.1063/1.2335582
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/6/10.1063/1.2335582
/content/aip/journal/apl/89/6/10.1063/1.2335582
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/content/aip/journal/apl/89/6/10.1063/1.2335582
2006-08-07
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Raman spectroscopy of sputtered AlN films: E2(high) biaxial strain dependence
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/6/10.1063/1.2335582
10.1063/1.2335582
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