Full text loading...
(Color online) Experimental schematic for proof of concept MEMS phonon characterization using electrostatic comb drive resonator. The dimensions of resonant beam and comb fingers are and , respectively, and comb finger gap and overlap are and , respectively.
(Color online) Frequency response of resonator at characterized by phonon (top) and displacement (bottom) measurements under drive conditions: (1) , ; (2) , ; and (3) , .
(Color online) Phonon vs amplitude transfer function for linear and nonlinear resonator operations at .
(Color online) Resonator frequency response characterized by concurrent phonon sensing and electrical network analyzer at atmospheric pressure.
Resonator in linear drive characterized in vacuum and air.
Article metrics loading...