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Annealing of indium tin oxide films by electric current: Properties and structure evolution
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10.1063/1.2335808
/content/aip/journal/apl/89/6/10.1063/1.2335808
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/6/10.1063/1.2335808
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Evolution of the film properties during annealing by direct electric current at different constant heating powers: (a) film temperature and normalized XRD peak integral intensity; (b) film resistivity and free electron density (the latter at only).

Image of FIG. 2.
FIG. 2.

Arrhenius plots of the amorphous-to-crystalline transformation rate for isothermal and electric current annealing, together with linear fits yielding the corresponding energies of activation, .

Image of FIG. 3.
FIG. 3.

Kolmogorov-Johnson-Mehl-Avrami plots of the degree of crystallization, , vs annealing time: (a) during isothermal annealing at different temperatures and (b) annealing by electric current at different electric powers. The linear fits result in the indicated kinetic exponents, .

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/content/aip/journal/apl/89/6/10.1063/1.2335808
2006-08-08
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Annealing of indium tin oxide films by electric current: Properties and structure evolution
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/6/10.1063/1.2335808
10.1063/1.2335808
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