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Fabrication and material properties of submicrometer films exfoliated using crystal ion slicing
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10.1063/1.2711655
/content/aip/journal/apl/90/11/10.1063/1.2711655
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/11/10.1063/1.2711655

Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) NRA H profiling of ions ( ion dose) implanted into before and after annealing. A TRIM calculation of the H distribution is shown. Inset: a micrograph of a CIS film bonded to Pyrex. (b) RBS/channeling data of the same samples. The curves indicate lattice disruption for various conditions (random orientation, virgin, as-implanted, for , and for ).

Image of FIG. 2.
FIG. 2.

(Color online) (a) AFM image of the undercut side of a thin film after H-ion implantation and thermal exfoliation, (b) the undercut side of a thin film after He-ion implantation and thermal exfoliation, (c) AFM image of a thin film after a polish.

Tables

Generic image for table
Table I.

Measured mean and rms roughness (in nm) for STO.

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/content/aip/journal/apl/90/11/10.1063/1.2711655
2007-03-16
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication and material properties of submicrometer SrTiO3 films exfoliated using crystal ion slicing
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/11/10.1063/1.2711655
10.1063/1.2711655
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