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(Color online) (a) Cross section showing the structure and the strain field component. (b) Magnification and scale are adjusted for the SOI crystal; is parallel to the  direction and is parallel to .
(Color online) 004 reciprocal space map ( of intensities) from SOI lines. (a) Calculated: only the shape is taken into account. (b) Experimental: resolution is . (c) Calculated: shape and displacement field determined using finite element calculations are considered. and , where and , and are, respectively, the angle of the incident beam with respect to the average (001) plane and the detection angle.
(Color online) Comparison between the (a) experimental and (b) calculated reciprocal maps (logarithmic scales) in the case of the 206 reflection.
(Color online) Modification of the calculated 004 reciprocal space map after removal of on both sides of the SOI line.
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