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Strain field in silicon on insulator lines using high resolution x-ray diffraction
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10.1063/1.2713335
/content/aip/journal/apl/90/11/10.1063/1.2713335
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/11/10.1063/1.2713335
/content/aip/journal/apl/90/11/10.1063/1.2713335
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/content/aip/journal/apl/90/11/10.1063/1.2713335
2007-03-16
2014-10-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Strain field in silicon on insulator lines using high resolution x-ray diffraction
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/11/10.1063/1.2713335
10.1063/1.2713335
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