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Enhanced mass sensitivity of stress-free, silicon nanowire-grown microcantilever sensors
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10.1063/1.2713344
/content/aip/journal/apl/90/11/10.1063/1.2713344
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/11/10.1063/1.2713344
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

SEM images of silicon nanowire-grown cantilevers. The nanowires were grown from a cantilever coated with a -thick nickel layer (a) and from a cantilever coated with a -thick nickel layer (b).

Image of FIG. 2.
FIG. 2.

SEM images of silicon nickel eutectic droplets on cantilevers coated with -thick (a) and -thick (b) nickel layers.

Image of FIG. 3.
FIG. 3.

(Color online) Variation in resonant frequency as a function of time during the adsorption of mercaptohexanol molecules on plain cantilever (black), Ni5 (blue), and Ni40 (red).

Image of FIG. 4.
FIG. 4.

(Color online) Deflection changes as a function of time during the adsorption of mercaptohexanol molecules on plain cantilever (black), Ni5 (blue), and Ni40 (red).

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/content/aip/journal/apl/90/11/10.1063/1.2713344
2007-03-13
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Enhanced mass sensitivity of stress-free, silicon nanowire-grown microcantilever sensors
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/11/10.1063/1.2713344
10.1063/1.2713344
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