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XPS Hf and Si core-level spectra acquired from the samples with and without nitrogen incorporation. The arrows indicate the two possible shoulder peak positions.
XPS N core-level spectra obtained from the plasma-nitrided samples before and after RTA.
High-resolution XTEM micrograph of the plasma-nitrided .
curves of the samples with and without nitrogen incorporation measured from the MOS capacitors at a frequency of . The inset shows the characteristic.
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