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Microstructure analysis of -axis oriented aluminum nitride thin films by high-resolution transmission electron microscopy
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10.1063/1.2715173
/content/aip/journal/apl/90/12/10.1063/1.2715173
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/12/10.1063/1.2715173
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Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) XRD pattern of AlN films grown on Si (100) substrate. The insets show the contour profile of the AlN {0002} (left) and (right) pole figures. (b) Cross-sectional TEM bright-field image of the as-grown AlN films. The insets show the corresponding SAED pattern (upper) and the AFM image of film surface (lower).

Image of FIG. 2.
FIG. 2.

HRTEM images of (a) the interface between two adjacent columns and (b) an individual column. The inset in (b) is the corresponding Fourier transformed pattern.

Image of FIG. 3.
FIG. 3.

(Color online) (a) HRTEM image of the interface between AlN film and Si substrate. The inset is the corresponding Al EELS mapping image. (b) HRTEM image of the Au-protected AlN surface layer.

Image of FIG. 4.
FIG. 4.

(Color online) AFM images of AlN surfaces after etching in KOH solutions for (a) and (b) , respectively. The two images have the same scale bar at the axis.

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/content/aip/journal/apl/90/12/10.1063/1.2715173
2007-03-20
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Microstructure analysis of c-axis oriented aluminum nitride thin films by high-resolution transmission electron microscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/12/10.1063/1.2715173
10.1063/1.2715173
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