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(Color online) Deposition rate per pulse (squares) and refractive index (circles) as a function of (a) at and (b) at . The solid line is the scaling predicted by Eq. (1). Inset: Film thickness vs pulse number at constant and .
(Color online) FTIR spectra of pulsed PECVD films at selected substrate temperatures. Inset: Deposition rate as a function of substrate temperature.
(Color online) (a) FTIR spectra of pulsed PECVD films at as a function of deposition rate and (b) leakage current from capacitors made from these samples. Inset: curve from the /pulse film.
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