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Regrowth-related defect formation and evolution in amorphized (001) Ge
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10.1063/1.2717538
/content/aip/journal/apl/90/13/10.1063/1.2717538
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/13/10.1063/1.2717538
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

WBDF XTEM images taken at diffraction conditions of (001) oriented Ge implanted with , (a) after implantation and (b) at .

Image of FIG. 2.
FIG. 2.

HRTEM images taken on axis of (001) oriented Ge implanted with , as implanted: (a) surface crystalline-to-amorphous transition region and (b) end-of-range amorphous-to-crystalline transition region.

Image of FIG. 3.
FIG. 3.

WBDF XTEM images taken at diffraction conditions of (001) oriented Ge implanted with , anneal for at (a) , (b) , (c) , and (d) . Types of defects are labeled next to the images.

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/content/aip/journal/apl/90/13/10.1063/1.2717538
2007-03-28
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Regrowth-related defect formation and evolution in 1MeV amorphized (001) Ge
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/13/10.1063/1.2717538
10.1063/1.2717538
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