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(Color online) SEM image of Ni nanodots precipitated from the evaporated Ni film on with different film thicknesses.
SEM image of Si nanopillars formed after ICP-RIE with different rf/bias power recipes.
Density and average diameter of Si nanopillars on the Si substrate as a function of rf/bias power ratio in the ICP-RIE system.
(Color online) (a) Micro-PL spectrum of as-made Si nanopillar array. (b) Normalized PL spectra of unprocessed pure Si wafer and etched Si nanopillar. (c) Si nanopillar-related PL and pure Si PL specta. (d) PL spectra of etched Si nanopillars.
(Color online) Peak wavelength of Si nanopillars as a function of rod size. Inset: Plan-view SEM picture of etched Si nanopillars.
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