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Technique for tilting GaAs photonic crystal nanocavities out of plane
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10.1063/1.2719612
/content/aip/journal/apl/90/14/10.1063/1.2719612
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/14/10.1063/1.2719612
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) S1 PC cavity before FIB milling. [(b)–(e)] Membrane devices flipped to different angles. (f) Magnification of the hinge region.

Image of FIG. 2.
FIG. 2.

(Color online) Schematic of the cavity flipping process.

Image of FIG. 3.
FIG. 3.

(Color online) Photoluminescence spectra for (a) an unprocessed and (b) a tilted cavity.

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/content/aip/journal/apl/90/14/10.1063/1.2719612
2007-04-05
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Technique for tilting GaAs photonic crystal nanocavities out of plane
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/14/10.1063/1.2719612
10.1063/1.2719612
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