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Schematic diagram of metal-point-contact FET (a) and normal SOI MOSFET (b) devices fabricated on the SOI substrate.
characteristics and characteristics (inset) for metal-point-contact FET.
characteristics as a function of RTA temperature (a) and the back interface-state distributions (b).
characteristics as a function of furnace annealing temperature after RTA (a) and back interface-state distributions (b).
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