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200 femtometer sensitivity for near-field analysis of surface acoustic waves in a scanning electron / scanning probe microscope hybrid system
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10.1063/1.2721123
/content/aip/journal/apl/90/14/10.1063/1.2721123
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/14/10.1063/1.2721123
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Measurement setup of SAW near-field detection in the SEM/SPM hybrid system.

Image of FIG. 2.
FIG. 2.

(Color online) Acoustic imaging of ferroelectric domain structures in : topography (a), vertical oscillation amplitude (b) and phase (c), and lateral oscillation amplitude (d) and phase (e).

Image of FIG. 3.
FIG. 3.

Slow line scan of vertical oscillation amplitude [dashed line in Fig. 2(b)].

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/content/aip/journal/apl/90/14/10.1063/1.2721123
2007-04-06
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: 200 femtometer sensitivity for near-field analysis of surface acoustic waves in a scanning electron / scanning probe microscope hybrid system
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/14/10.1063/1.2721123
10.1063/1.2721123
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