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Optical characterization of -laser-ablated Si-rich
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10.1063/1.2721141
/content/aip/journal/apl/90/15/10.1063/1.2721141
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/15/10.1063/1.2721141
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Transmission change of as-grown and laser annealed at . Inset: Transmission spectra of pure quartz, as-grown , and laser annealed at .

Image of FIG. 2.
FIG. 2.

(Color online) Absorption spectra of as-grown and laser annealed at . Inset: The calculated absorption spectra of and .

Image of FIG. 3.
FIG. 3.

(Color online) Optical band gap of laser annealed as a function of laser intensity. Inset: Tauc plot, as a function of photon energy for as-grown sample and laser RTA samples at from .

Image of FIG. 4.
FIG. 4.

(Color online) PL spectrum of PECVD-grown annealed at of and transmission change of as-grown and laser annealed at of 6 and .

Image of FIG. 5.
FIG. 5.

(Color online) Refractive index and absorption coefficient of laser RTA as a function of laser intensity.

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/content/aip/journal/apl/90/15/10.1063/1.2721141
2007-04-09
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Optical characterization of CO2-laser-ablated Si-rich SiOx
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/15/10.1063/1.2721141
10.1063/1.2721141
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