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(Color online) (a) characteristics of GaAs MOS capacitor at for and gate stacks on -type GaAs. Cross-sectional HRTEM images of GaAs MOS capacitor with (b) and (c) gate stacks on -GaAs and TaN gate electrode. The area of MOS capacitor is .
Frequency dispersion in characteristics between 10 and for (a) and (b) gate stacks.
Current density-voltage characteristics of and gate stacks on -type GaAs.
(Color online) XPS spectra for thin and gate stacks deposited on -GaAs and annealed at for in ambient. (a) Hf and (b) As spectra for . (c) Hf and (d) As spectra for gate stacks. Spectra were recorded using radiation and a take-off angle of 30°.
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