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Single-crystal silicon/silicon dioxide multilayer heterostructures based on nanomembrane transfer
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View: Figures


Image of FIG. 1.
FIG. 1.

(Color online) (a) Optical image of three stacked membranes with a SOG layer in between each membrane. Visible are the three sets of holes with slightly different orientations and offset from each other. (b) and (c) show x-ray diffraction data for the same sample. (b) scan showing three broad membrane peaks as well as the sharp substrate peak. (c) scan corresponding to the left peak in (b). The blue line is a simulation using a best fit silicon layer thickness of . Similar scans can be obtained for the other two-membrane peaks.

Image of FIG. 2.
FIG. 2.

(Color online) [(a)–(c)] AFM images of the top Si layer from three different samples with different numbers of layers. Sample (a) has three Si layers (with intervening SOG) and its rms surface roughness is ; sample (b) has two layers, and its rms roughness is ; sample (c) is a single transferred membrane on SOG, and it has rms roughness. (d) Tilted SEM image of a membrane cross section. FIB was used to cut the cross section.

Image of FIG. 3.
FIG. 3.

(Color online) Specular reflectivity of Bragg reflectors for -polarized radiation and an incident angle of 35° from the normal. The detailed layer thicknesses are as follows: (a) SOG/Si substrate, (b) SOG/Si substrate. Calculations are performed using a matrix formulation. The green curves ignore the presence of holes in the membranes. The blue curves include the effect of holes. The holes decrease the reflectivity by for a single membrane. This effect decreases for heterostructures with more than one membrane and is less than 0.1% for three membranes.


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Scitation: Single-crystal silicon/silicon dioxide multilayer heterostructures based on nanomembrane transfer