1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Low refractive index Si nanopillars on Si substrate
Rent:
Rent this article for
USD
10.1063/1.2736281
/content/aip/journal/apl/90/18/10.1063/1.2736281
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/18/10.1063/1.2736281
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic diagram for fabricating Si nanopillar array on Si using a self-assembled Ni nanodot etching mask on substrate is illustrated. The scanning electron microscopic (SEM) photographs of unprocessed Si substrate, self-aggregated Ni on , and ICP-RIE etched Si nanopillars on Si are shown for example.

Image of FIG. 2.
FIG. 2.

SEM photographs of Si nanopillar array obtained by detuning the ICP power at (a) 50, (b) 100, (c) 150, and (d) .

Image of FIG. 3.
FIG. 3.

(Color online) Surface reflectance and corresponding refractive indices of unprocessed bulk Si and Si nanopillar array on Si substrate.

Image of FIG. 4.
FIG. 4.

(Color online) Angular dependent reflectance of Si nanopillar array and bulk Si substrate (inset) measured by HeNe laser at and different polarizations.

Loading

Article metrics loading...

/content/aip/journal/apl/90/18/10.1063/1.2736281
2007-05-03
2014-04-24
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low refractive index Si nanopillars on Si substrate
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/18/10.1063/1.2736281
10.1063/1.2736281
SEARCH_EXPAND_ITEM