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Galvanic corrosion induced degredation of tensile properties in micromachined polycrystalline silicon
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10.1063/1.2737370
/content/aip/journal/apl/90/19/10.1063/1.2737370
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/19/10.1063/1.2737370
/content/aip/journal/apl/90/19/10.1063/1.2737370
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/content/aip/journal/apl/90/19/10.1063/1.2737370
2007-05-07
2014-07-12
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Galvanic corrosion induced degredation of tensile properties in micromachined polycrystalline silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/19/10.1063/1.2737370
10.1063/1.2737370
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