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Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges
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10.1063/1.2735934
/content/aip/journal/apl/90/20/10.1063/1.2735934
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/20/10.1063/1.2735934
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Top-down schematic depicting experimental setup used to measure radial dependence of the sheath voltages across the electrode. The gated charge coupled device used to capture the laser-induced fluorescence generated by the pump beam, is mounted on a translation stage.

Image of FIG. 2.
FIG. 2.

(Color online) LIF-dip profiles in the bulk of the discharge, above the sheath (upper figures) and LIF-dip profiles in the sheath, near the electrode (lower figures) for (a) and (b) cases. The black (엯) traces correspond to profiles taken near the edge of the electrode and the red (◻) traces correspond to profiles taken near the center of the electrode. For comparison, the green profiles represent LIF-dip profiles measured when the lasers are fired in synch with the drive.

Image of FIG. 3.
FIG. 3.

(Color online) Radial dependence of the potential drop across a sheath formed between a diameter electrode and a capacitively coupled discharge for the three single frequency cases of (◆), (●), and (▾). Also included are sheath voltages for the dual frequency cases of 13.56 and (▴). Both total applied rf power and argon gas pressure are fixed.

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/content/aip/journal/apl/90/20/10.1063/1.2735934
2007-05-16
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/20/10.1063/1.2735934
10.1063/1.2735934
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