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AFM images showing the surface morphology of AlN layer of (a) and (b) in thickness by the interrupted method.
(a) TEM dark-field image and (b) energy-filtered transmission electron microscopy elemental maps of the AlN layer for the film thickness of .
TEM cross sectional dark-field images of the AlN layer for the film thickness of taken with (a) and (b) .
Room temperature micro-Raman spectrum of the thick AlN film with a spectrum from a standard Si substrate for calibration.
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