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Powerful polymeric thermal microactuator with embedded silicon microstructure
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10.1063/1.2742599
/content/aip/journal/apl/90/21/10.1063/1.2742599
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/21/10.1063/1.2742599

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic drawing of the proposed polymeric thermal actuator, consisting of a symmetrically meandering silicon (Si) microstructure, SU-8 encapsulant, and an aluminum (Al) heater, together with a representative unit cell of three layers (Si/SU-8/Si). (b) The measured tip displacement for a sample device (, , and , and ) as a function of input power when electrically activated by the aluminum heater ( thick).

Image of FIG. 2.
FIG. 2.

Microscope images showing full and partial views of the micromachined devices: (a) a scanning electron micrograph of a sample device still residing on silicon substrate (, , and ); (b) An optical image of a polymeric actuator with wide meandering silicon microstructure; (c) an optical image of a polymeric actuator with wide parallel plates.

Image of FIG. 3.
FIG. 3.

Trends of the apparent transverse CTE (top) and the blocked transverse stress (bottom) with respect to the aspect ratio of the layer width to the spacing between the layers, for two polymeric composite designs: (i) embedded with parallel silicon plates or (ii) embedded with meandering silicon microstructures.

Tables

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Table I.

Comparison of thermal expandable materials.

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/content/aip/journal/apl/90/21/10.1063/1.2742599
2007-05-23
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Powerful polymeric thermal microactuator with embedded silicon microstructure
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/21/10.1063/1.2742599
10.1063/1.2742599
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