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Imaging of acoustic pressure radiation from vibrating microstructure in atmosphere using thermal microprobe
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10.1063/1.2742908
/content/aip/journal/apl/90/21/10.1063/1.2742908
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/21/10.1063/1.2742908
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Measurement setup for acoustic pressure radiation from a vibrating micro- or nanostructure.

Image of FIG. 2.
FIG. 2.

(Color online) Voltage and current relationship of the thermal probe. Inset is the scanning electron microscopy image of the Si micromachined thermal probe.

Image of FIG. 3.
FIG. 3.

(Color online) (a) Mechanical vibration spectrum measured by laser Doppler vibrometer. (b) Corresponding acoustic pressure radiation spectrum measured by the Si thermal probe.

Image of FIG. 4.
FIG. 4.

(Color online) (a) Profiles of acoustic pressure radiation along cross section at different distances from the resonator.

Image of FIG. 5.
FIG. 5.

(Color online) Vibration amplitude and acoustic pressure radiation images of triangular cantilevers. (a) is the vibration amplitude and (b) corresponds to its acoustic pressure radiation. (c) is the amplitude of another sample and (d) is the corresponding acoustic pressure radiation. (Image sizes are .)

Image of FIG. 6.
FIG. 6.

(Color online) (a) -thick beam with a crack and (b) acoustic pressure radiation image. (Image sizes are .)

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/content/aip/journal/apl/90/21/10.1063/1.2742908
2007-05-22
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Imaging of acoustic pressure radiation from vibrating microstructure in atmosphere using thermal microprobe
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/21/10.1063/1.2742908
10.1063/1.2742908
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