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Dielectric charging in radio frequency microelectromechanical system capacitive switches: A study of material properties and device performance
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10.1063/1.2746056
/content/aip/journal/apl/90/23/10.1063/1.2746056
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/23/10.1063/1.2746056
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Typical capacitance-voltage characteristic of MEMS switch at (엯) 300 and (●) . The is shown for the ascending and descending characteristic of both temperatures.

Image of FIG. 2.
FIG. 2.

TSDC spectrum and its analysis. The peaks P1–P4 arise from dipolar while P5 from the space charge relaxation.

Image of FIG. 3.
FIG. 3.

Temperature dependence of average polarization that corresponds to the minimum value of capacitance-voltage characteristic. The solid curves represent the contribution from dipolar polarization that was derived from TSDC assessment with a common fitting parameter and values for space charge polarization of and for the descending and ascending characteristics, respectively.

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/content/aip/journal/apl/90/23/10.1063/1.2746056
2007-06-06
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dielectric charging in radio frequency microelectromechanical system capacitive switches: A study of material properties and device performance
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/23/10.1063/1.2746056
10.1063/1.2746056
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