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Near bulk-limited of long-wavelength infrared type-II superlattice photodiodes with polyimide surface passivation
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10.1063/1.2747172
/content/aip/journal/apl/90/23/10.1063/1.2747172
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/23/10.1063/1.2747172
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Inverse product vs the perimeter to area ratio for (a) an unprocessed die, (b) the same die after a vacuum desorption, (c) another die from the same processing run after a vacuum desorption, and (d) the same die as (c) but with of polyimide passivation spun onto the sample. A prolonged vacuum desorption increases the diode uniformity. The polyimide passivation (d) improved the uniformity even further, bringing the zero-bias electrical behavior close to the near bulk-limited case.

Image of FIG. 2.
FIG. 2.

(Color online) product for nine thermal cycles of a representative LWIR type-II photodiode. Thermal cycles 1 and 2 were conducted prior to polyimide passivation, whereas thermal cycles 3–9 took place after polyimide passivation.

Image of FIG. 3.
FIG. 3.

Average (solid line) and standard deviation (vertical bars) of ten representative curves from polyimide passivated diodes ranging in size from on a side.

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/content/aip/journal/apl/90/23/10.1063/1.2747172
2007-06-11
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Near bulk-limited R0A of long-wavelength infrared type-II InAs∕GaSb superlattice photodiodes with polyimide surface passivation
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/23/10.1063/1.2747172
10.1063/1.2747172
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